・YD-2501LRN3 |
・YD-2502LRN3 |
・YD-4002LRN3 |
・YD-4003LRN3 |
・YD-4005LRN3 |
・YD-4007LRN3 |
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Features
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It is resist to abrasion by slurry, deadhead operation and dry running, because of no sliding parts during operation. |
No consumable parts such as Mechanical seal or Grand packing. |
The linear seal is protected by Proximity sensor and PLC as standard.
* The solenoid valve is available as an option.
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Examples of Use
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For easy crystallized liquid (acid, alkaline, solvent, etc.) |
For replacing pumps damaged by liquid with slurry |
For replacing pumps easy damaged by deadhead operation |
For replacing pumps which need outer cooling liquid for seal parts such as mechanical seal
(Injection or piping for water is not required.)
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Circulating CMP slurry liquid and Cerium oxide is suitable. |
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